With this paper, The brand new lapping slurry and sprucing slurry are released. And the deliquescence degree of CLBO is fallen to lowest. A new Doing the job technology is usually adopted. After rough sharpening, the focus of ultra-precision sprucing slurry is enhanced correctly. So does the extremely-precision sprucing pace, as well as the wiping velocity is faster than the deliquescence velocity. The CLBO crystal floor roughness can obtain 1nm and maintain the floor good quality very well. Access by means of your establishment

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As an illustration, The existing concave OC could be replaced by a aircraft mirror which could mitigate the ability density on the area of M1 as well as the diamond. In addition, utilizing superior destruction threshold coatings for M1 and diamond would also Increase the output ability with none damages. Then, the NIR laser on the 2nd Stokes wavelength might be substantial enough, together with its very good beam high quality, to make the final DUV laser at 193 nm using a high normal electric power.

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